Waferpedia

Comparison ledger

1088versusAlpha 303 i K

Heller 1088, Tokyo Electron Alpha 303 i K, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1088Heller
Alpha 303 i KTokyo Electron
OEMHellerTokyo Electron
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHeller 1088Tokyo Electron Alpha 303
Cited variants—
  • Alpha 303 i K Furnace, 12" MTO[1]
  • Alpha 303 i K Furnace, 12" DCS-MTO[2]
  • Alpha 303 i K MTO[1]
  • Alpha 303 i K DCS-MTO[2]
Specifications
Heating Zones8 zones (4 top and 4 below) plus 1 cooling zone[3]—
Heating MethodForced convection[3]—
Conveyor Width18 inches (45 cm)[3]—
Heated Length43.5 inches (111 cm)[3]—
Overall Length96 inches (244 cm)[3]—
Height50 inches (127 cm)[3]—
Net Weight900 lbs (409 kg)[3]—
Thermal ProfilerIncluded[3]—
Oven TopCounter balance for easy access to conveyor[3]—
Solder CompatibilityLead-free and leaded soldering[3]—
Configuration—MTO[1]
Software Version—V 2.13 Rev.004[4]
CIM—SECS[5]
Process—MOL[5]
Factory Interface—FOUP[4]
Handler System—Loadport (2)[4]
Category—Thermal / Diffusion[4]
Wafer size—12 inch[1]
Tool type—Furnace[4]
CIM SECS—Supported[4]
Configuration options—MTO, DCS-MTO[4]
Vintage (MTO)—2002[1]
Vintage (DCS-MTO)—2009[2]
Handler system—2 Handler System Loadport (2)[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]smtdevices.comsmtdevices.com
  4. [4]waferpedia.comwaferpedia.com
  5. [5]inventory listing