Comparison ledger
FEI Quanta 600 FEG, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | FEI | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | FEI Quanta 600 FEG | KLA .204 PSL Wafer |
| Cited variants |
| — |
| Specifications | ||
| Resolution in ESEM mode | 1.5 nm[1] | — |
| Operating pressure range | 6 x 10^-4 Pa to ~1000 Pa[1] | — |
| Detector | Special wet STEM detector[1] | — |
| Heating and cooling stage temperature range | 20-1000°C[1] | — |
| Manipulators | Dual Kleindiek nano-manipulators[1] | — |
| Micro-droplet injection system | Included for electrical and mechanical measurements[1] | — |
| Gas injection systems | For platinum and gold e-beam deposition[1] | — |
| EDS | EDAX Energy Dispersive x-ray spectrometer[1] | — |
| EBSD | Electron backscatter diffraction detector available[1] | — |
| Resolution (ESEM mode) | 1.5 nm[1] | — |
| Pressure range | 6 x 10^-4 Pa to ~1000 Pa[1] | — |
| Temperature range (heating/cooling stages) | 20-1000°C[1] | — |
| Wet STEM detector | Present[1] | — |
| Dual Kleindiek nano-manipulators | Present[1] | — |
| EDS (Energy Dispersive x-ray spectrometer) | EDAX[1] | — |
| EBSD (Electron backscatter diffraction detector) | Present[1] | — |
| Configuration | — | NIST Traceable[2] |
| Wafer Size | — | 8 inch[2] |
| Traceability | — | NIST[3] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[2] |
| NIST Traceable | — | Yes[2] |
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