Waferpedia

Comparison ledger

520ISversus1 WBS 1 Wafer Substrate

EV Group 520IS, Logitech 1 WBS 1 Wafer Substrate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
520ISEV Group
OEMEV GroupLogitech
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyEV Group 520ISLogitech 1 WBS 1 Wafer Substrate
Specifications
Machine typewafer bonder[1]—
Bonding methodsanodic, eutectic, polymer, fusion[1]—
Typewafer bonder[2]—
Bonding modesanodic, eutectic, polymer, fusion[2]—
Associated backend contextlisted under backend processes and packaging[2]—
Wafer Size—6 inch[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]nanofab.utah.edunanofab.utah.edu
  3. [3]nanofab.utah.edunanofab.utah.edu
  4. [4]Equipment inventory listing