Comparison ledger
Disco DCS 1460 Wafer Cleaner Spin, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000PYES | |
|---|---|---|
| OEM | Disco | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Disco DCS | YES 1000P |
| Specifications | ||
| Configuration | Table upgrade for VCSEL cleaning[1] | Parallel plate[4] |
| Maximum workpiece size | Φ300 mm[2] | — |
| Application frame | 2-12[2] | — |
| Table RPM range | 100 to 3,000 min⁻¹[2] | — |
| Setting time for cleaning/drying | 0 to 999 sec[2] | — |
| Cleaning nozzle speed | 1 to 37.5 °/sec[2] | — |
| Cleaning range | Φ450 mm (up to 310 x 310 mm)[2] | — |
| Cleaning pressure range | 2.3 to 11.8 MPa[2] | — |
| Equipment dimensions (W×D×H) | 500 × 650 × 1,220 mm[2] | — |
| Equipment weight (Dry mass) | Approx. 144 kg[2] | — |
| Max. workpiece size | Φ300 mm[2] | — |
| Table RPM | 100 to 3,000 min^-1[2] | — |
| Cleaning nozzles | Standard high pressure cleaning nozzle; optional atomizing cleaning nozzle; dual nozzle configuration possible[2] | — |
| Operator interface | 4 inch LCD touch panel[2] | — |
| Model | — | 1000P[3] |
| System type | — | Plasma cleaning system[3] |
| Shelf configuration | — | Four 16 x 16 inch shelves[3] |
| Total capacity | — | 1024 square inches[3] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[3] |
| Number of shelves | — | 4[3] |
| Shelf size | — | 16 x 16 inches[3] |
| Power | — | 1000 W[4] |
| Operation modes | — | Active, RIE, Downstream[3] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[3] |
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