Waferpedia

Comparison ledger

321versusDFD 6340 Dicing

Disco 321, Disco DFD 6340 Dicing, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
321Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 321Disco DFD 6340
Specifications
OEMDisco[1]—
Model321[1]—
Equipment typeWafer Dicing Saw[1]—
Facility contextCleanroom Instrumentation[1]—
Application areaNano and Micro Fabrication[1]—
LocationFNT 4.106[1]—
Wafer SizeUp to 6 inches[2]8 inch[7]
Spindle Power1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3]—
Spindle Power (alternate)1500 Watt spindle[2]—
Non-Contact SetupNon Contact Setup[3]—
MicroscopeMicroscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3]—
Broken Blade DetectionBroken Blade Detection[3]—
Light TowerIncludes Light Tower[3]—
Chuck Type6" Universal Chuck (or 6" Porous Film Frame Chuck)[2]—
Wafer size capabilityUp to 6" wafers[3]—
Chuck6-inch porous film frame chuck[2]—
Spindle power1500-watt spindle[2]—
FootprintSmall footprint[2]—
SetupNon-contact setup[3]—
Blade break detectionBroken blade detection[3]—
Other featuresFloppy drive, light tower, blade tools, manuals[3]—
Voltage—200 VAC[4]
Phase—3 Phase[4]
Configuration—50/60 Hz[4]
Spindles—Dual[6]
Display—LCD Touch Screen[5]
Cleaning Station—Yes[5]
CO2 Unit—Yes[5]
Power—200 VAC, 3 Phase, 50/60 Hz[4]
Spindle—Dual Spindle (option)[6]
Dual Spindle—Yes[6]
LCD Touch Screen—Yes[5]
Electrical—200 VAC, 3 Phase, 50/60 Hz[4]
Power Supply—200 VAC, 3 Phase, 50/60 Hz[4]
Spindle Configuration—Dual Spindle[6]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edutmi.utexas.edu
  2. [2]jmind.comjmind.com
  3. [3]gtsaz.comgtsaz.com
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]Equipment inventory listing