Comparison ledger
CyberOptics SQ 3000 3D AOI SPI, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SQ 3000 3D AOI SPICyberOptics | |
|---|---|---|
| OEM | CyberOptics | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CyberOptics SQ 3000 | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | Inline[1] | NIST Traceable[2] |
| Wafer Size | — | 8 inch[2] |
| Traceability | — | NIST[3] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[2] |
| NIST Traceable | — | Yes[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →