Waferpedia

Comparison ledger

1000 Hot PlateversusAlpha 8 SE Z

CEE 1000 Hot Plate, Tokyo Electron Alpha 8 SE Z, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Alpha 8 SE ZTokyo Electron
OEMCEETokyo Electron
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateTokyo Electron Alpha
Specifications
Configuration4"[1]SOD[2]
TypeHot Plate[1]—
Wafer Size4 inch[1]—
OEM—Tokyo Electron[2]
Model—Alpha 8 SE Z[2]
Equipment type—Furnace[2]
Wafer size—8 inch[2]
Description—8" SOD[2]
Vintage—2007[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing