Waferpedia

Comparison ledger

1000 Hot PlateversusTSE 11 Thermal Shock

CEE 1000 Hot Plate, ESPEC TSE 11 Thermal Shock, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEEESPEC
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateESPEC TSE 11
Specifications
Configuration4"[1]50/60 Hz[2]
TypeHot Plate[1]Thermal Shock Chamber[2]
Wafer Size4 inch[1]—
Phase—3 Phase[2]
Voltage—200V[2]
Power Supply—3-Phase 200V[2]
Frequency—50/60 Hz[2]
Manufacturing Year—2010[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing