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100 SpinversusGasonics Aura 3010

CEE 100 Spin, Lam Research Gasonics Aura 3010, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
100 SpinCEE
Gasonics Aura 3010Lam Research
OEMCEELam Research
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 100Lam Research Gasonics Aura
Specifications
ConfigurationVolts 115[1]Parts machine[2]
Equipment type—Asher[4]
Wafer size—6 inch[4]
Condition—Parts machine[2]
Make—Lam / Novellus / Gasonics[2]
Model—Aura 3010[2]
Type—Asher[2]
Wafer Sizes—6 inch[4]
Product description—Parts machine[2]
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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing