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Comparison ledger

11000versusPA 300 ProbeShield Probing

Cascade Microtech 11000, SUSS MicroTec PA 300 ProbeShield Probing, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11000Cascade Microtech
OEMCascade MicrotechSUSS MicroTec
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCascade Microtech 11000SUSS MicroTec PA 300
Specifications
ConfigurationWith antivibration table[1]Velox 2.2.3.23[3]
Chuck—12-inch nickel plated aluminum chuck[4]
Control unit—ATT M300 Control Unit[4]
Microscope—Cascade CMPS-888 Microscope[4]
Micropositioners—Suss PH150 Micropositioner 3ea[3]
Optics—10X,2X Mitutoyo Plan Apo Objective 2ea[4]
Failure mode—Error57 No Motor Power (possible defective Motion Drive Board)[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com