Comparison ledger
Cascade Microtech 11000, KLA Inspex Eagle, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11000Cascade Microtech | Inspex EagleKLA |
|---|---|---|
| OEM | Cascade Microtech | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | 8" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Cascade Microtech 11000 | KLA Inspex Eagle |
| Specifications | ||
| Configuration | With antivibration table[1] | Chuck, 6”[3] |
| Wafer size | — | Wafer capability 4” up to 8"[3] |
| Chuck | — | 6"[3] |
| Prealigner | — | 6"[3] |
| Wafer capability | — | 4" up to 8"[3] |
| Wafer handling | — | Cassette to cassette[3] |
| Ports | — | 2[3] |
| Microscope | — | Zeiss Microscope[3] |
| Manuals | — | Including manuals[3] |
| Inspection type | — | Patterned Wafer Laser Inspection[4] |
Plan your fab
Building a Test & Probe process? Get a complete equipment list.
Open the fab equipment planner →