Comparison ledger
Canon FPA 3000 i 5 + Fine Pattern, SUSS MicroTec MA 6 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MA 6 MaskSUSS MicroTec | |
|---|---|---|
| OEM | Canon | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 3000 | SUSS MicroTec MA 6 Mask |
| Cited variants | — | |
| Specifications | ||
| Configuration | Main 1:[2] | 1000 Watt Power Supply[4] |
| Phase | 3 Phase[2] | — |
| Wafer sizes supported | 6 inch[3] | — |
| Power supply main 1 | 3 Phase - 3 Wire - 50/60 Hz[2] | — |
| Power supply main 2 | 1 Phase - 2 Wire - 50/60 Hz[2] | — |
| Vintage | 1997[2] | — |
| Voltage | — | 230 V[5] |
| UV lamp power supply | — | CIC1200/157308LS[6] |
| Wafer Sizes | — | 2, 3, 4, 5, 6, 12 inch[5] |
| Resolution | — | 1 Micron on 6 inch wafers[4] |
| Power Supply | — | 1000 Watt[4] |
| Illumination | — | IR Back Side Illumination[4] |
| Microscope | — | Split Field Microscope with 6 Objectives[4] |
| Alignment | — | Infrared Alignment[5] |
| Topside Alignment Objectives | — | MplanFL N 5x/0.15, MplanFL N 10x/0.30, LMPlanFL N 20x/0.40[6] |
| Air Chuck | — | 7-inch[6] |
| Voltage / Frequency | — | 200-240V, 50/60Hz[6] |
| Make | — | SUSS[7] |
| Model | — | MA 6[7] |
| Product Details | — | up to 6" - 50/60 Hz - 230 V - HDD - Software - with Infrared Alignment - No BSA 2001 Vintage[5] |
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