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Comparison ledger

VAC 407 2 Aversus160 XP Ion

Brooks VAC 407 2 A, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
VAC 407 2 ABrooks
160 XP IonVarian
OEMBrooksVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks VAC 407 2 AVarian 160 XP Ion
Specifications
Wafer Sizes612 inch[1]—
Configuration—150mm High Current IMP[2]
OEM—Varian[3]
Model—160 XP Ion[3]
Category—Ion Implantation[2]
Tool type—ion implanter[2]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing