Waferpedia

Comparison ledger

017-0146-01 PrealignerversusWFH 4 C Wafer Robot

Brooks 017-0146-01 Prealigner, Kensington WFH 4 C Wafer Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBrooksKensington
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerKensington WFH
Specifications
Configuration—with aligner[1]
Wafer size—6 inch[1]
Aligner—Included[1]
Category—Lithography[2]
Manufacturer—Kensington[1]
Model—WFH 4 C[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com