Waferpedia

Comparison ledger

017-0024-01 PrealignerversusMA 150

Brooks 017-0024-01 Prealigner, SUSS MicroTec MA 150, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0024-01 PrealignerBrooks
MA 150SUSS MicroTec
OEMBrooksSUSS MicroTec
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1995 1995 vintage · 2012 Third-party support only
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerSUSS MicroTec MA 150
Cited variants—
Specifications
Voltage—230 V[2]
Configuration—3200 VA[2]
Frequency—50 Hz[2]
017-0024-01 Prealigner entryMA 150 entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing