Waferpedia

Comparison ledger

IGF 6680 F 4versus1000 Hot Plate

Blue M IGF 6680 F 4, CEE 1000 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBlue MCEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M IGFCEE 1000 Hot Plate
Specifications
ConfigurationDigital programmable controller[1]4"[2]
TemperatureMaximum temperature 593°C[1]—
Type—Hot Plate[2]
Wafer Size—4 inch[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing