Waferpedia

Comparison ledger

HS 1202 EFGversus1000 Hot Plate

Blue M HS 1202 EFG, CEE 1000 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBlue MCEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M HS 1202 EFGCEE 1000 Hot Plate
Specifications
Max temp150°C[1]—
Voltage240 V[1]—
Configuration3 Ph[1]4"[2]
Frequency60 Hz[1]—
Type—Hot Plate[2]
Wafer Size—4 inch[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing