Waferpedia

Comparison ledger

0 V 500versusAlpha 303 i K Vertical

Blue M 0 V 500, Tokyo Electron Alpha 303 i K Vertical, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
OEMBlue MTokyo Electron
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 V 500Tokyo Electron Alpha 303 i K Vertical
Specifications
Manufacturer—Tel (Tokyo Electron)[1]
Model—Alpha 303 i K[1]
Equipment Type—Vertical Furnace[1]
Vintage (unit asset #82024)—2006[1]
Vintage (unit asset #82023)—2005[2]
Vintage (unit asset #82022)—2004[3]
Vintage (unit asset #82021)—2010[4]
Vintage (unit asset #82020)—2006[5]
Type—Vertical furnace[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing