Comparison ledger
Blue M 0 V 500, Blue M SPX, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 V 500Blue M | SPXBlue M |
|---|---|---|
| OEM | Blue M | Blue M |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 V 500 | Blue M SPX |
| Specifications | ||
| Temperature range | — | ambient to 350°C[1] |
| Temperature uniformity | — | +/- 1% of setpoint[1] |
| Control accuracy | — | +/-0.5°C[1] |
| Resolution | — | +/-0.1°C[1] |
| Heating power | — | 9 kW[1] |
| External dimensions | — | 1000 x 1250 x 2850 mm high[1] |
| Insulation | — | 100 mm fiberglass insulation[1] |
| Door seal | — | Blue M silicone door seal[1] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →