Comparison ledger
Blue M 0 V 500, Blue M 1200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 V 500Blue M | 1200Blue M |
|---|---|---|
| OEM | Blue M | Blue M |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2010 SOP revision date |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 V 500 | Blue M 1200 |
| Cited variants | — | |
| Specifications | ||
| Equipment type | — | C box furnace[2] |
| Type | — | Box furnace[2] |
| Maximum temperature | — | 1200 °C[2] |
| Minimum temperature setpoint | — | 0 °C[2] |
| Controller | — | UP150 programmable controller[2] |
| Maximum program segments | — | 16 segments (SP1–SP16, tM1–tM16)[2] |
| Program end modes | — | Reset (shut off), Hold (hold temperature), Repeat (continuous)[2] |
| Nitrogen flowmeter maximum | — | 13 slpm[2] |
| PID coefficients | — | User-settable proportional (p), integral (I), derivative (d) via optimized table[2] |
| Alarm temperature setting | — | Typically 10 °C higher than highest process temperature[2] |
| Temperature rating | — | 1200 C[2] |
| Operating atmosphere | — | nitrogen flow[2] |
| Tube furnace type | — | split-hinge tube furnace[1] |
| Tube furnace configuration | — | horizontal or vertical use[1] |
| Tube furnace temperature control | — | independent digital temperature control modules[1] |
| Tube furnace control type | — | multisegment[1] |
| Tube furnace temperature range | — | 100 C to 1200 C[1] |
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