Comparison ledger
Axcelis NV 8250 HT Ion, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NV 8250 HT IonAxcelis | |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV 8250 | Varian 0216 7696, E 11368072 ESC |
| Specifications | ||
| Voltage | 208 VAC[1] | — |
| Phase | 3 Phase[1] | — |
| Configuration | 50/60 Hz[2] | Platen ADV-S Type[3] |
| Power | 36 kVA[2] | — |
| Input Breaker | 100 A[1] | — |
| Largest Load | 88 A[1] | — |
| Max. Interrupt Capacity | 85 A[1] | — |
| Wafer Size | 8 inch[2] | — |
| Frequency | 50/60 Hz[1] | — |
| Category | Ion Implantation[1] | Ion Implantation[4] |
| OEM | Axcelis[2] | — |
| Model | NV 8250 HT[2] | — |
| Type | — | ESC Platen ADV-S Type[3] |
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