Comparison ledger
Axcelis 200 PCU, Varian EHP 500 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | EHP 500 IonVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Varian EHP 500 Ion |
| Cited variants | — | |
| Specifications | ||
| P/N | SC 4840 A[3] | — |
| Frequency | 50 Hz[3] | — |
| Phase | 3 Phase[3] | — |
| Voltage | 400 V[3] | — |
| Software version | — | 13.42.18[4] |
| CIM | — | GEM and SECS[4] |
| Handler | — | End station PP+ with both Load Lock[4] |
| Configuration | — | SMIF[4] |
| Wafer size | — | 8 inch[4] |
| Handler / End station | — | End station PP+ with both Load Lock[4] |
| SMIF | — | Included[4] |
| Scrubber Exhaust | — | Included[4] |
| 2 Stage Rough Pump | — | Included[4] |
| Load Lock Rough Pump | — | Included[4] |
| Vintage year | — | 1998[4] |
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