Comparison ledger
Axcelis 200 PCU, Varian E 500 EHP Medium Current, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | E 500 EHP Medium CurrentVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | Includes thin wafer handling kit |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Varian E 500 EHP Medium Current |
| Cited variants | — | |
| Specifications | ||
| P/N | SC 4840 A[3] | — |
| Frequency | 50 Hz[3] | — |
| Phase | 3 Phase[3] | 3 Phase[4] |
| Voltage | 400 V[3] | 208V[4] |
| Wafer size | — | Includes thin wafer handling kit[4] |
| Configuration | — | Can be converted to 8"[4] |
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