Comparison ledger
Axcelis 200 PCU, Varian E 220, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | E 220Varian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | 1995 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Varian E 220 |
| Cited variants | — | |
| Specifications | ||
| P/N | SC 4840 A[3] | — |
| Frequency | 50 Hz[3] | — |
| Phase | 3 Phase[3] | 3 Phase[4] |
| Voltage | 400 V[3] | 208 Volts[4] |
| Configuration | — | 5 Wire[4] |
| Manufacturer | — | Varian[4] |
| Model | — | E 220[4] |
| Category | — | Ion Implantation[5] |
| System type | — | Ion implanter[5] |
| Electrical phase | — | 3-phase[4] |
| Wiring | — | 5-wire[4] |
| E-clamp capability | — | E-clamp 6"[4] |
| Processing | — | Single blade processing[4] |
| Loading chambers | — | Two loading chambers[4] |
| Implants | — | Ar, AsH3, BF3 and PH3[4] |
| Vintage | — | 1995 Vintage[4] |
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