Comparison ledger
Axcelis 200 PCU, Edwards EPX 180 NE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | EPX 180 NEEdwards |
|---|---|---|
| OEM | Axcelis | Edwards |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | 2008 Vintage year |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Edwards EPX 180 NE |
| Cited variants | — | |
| Specifications | ||
| P/N | SC 4840 A[3] | — |
| Frequency | 50 Hz[3] | 50/60 Hz[5] |
| Phase | 3 Phase[3] | — |
| Voltage | 400 V[3] | 200/208V[5] |
| Pumping speed | — | 106 CFM[4] |
| Ultimate vacuum | — | < 7 x 10^-5 Torr[4] |
| Inlet | — | ISO63[4] |
| Exhaust | — | KF25[4] |
| Weight | — | 104 lbs[4] |
| Current | — | 16 Amps[5] |
| Display and control panel | — | Integrated[5] |
| Gas purge | — | High temperature gas purge assembly[5] |
| Mounting | — | Metric eyebolt / heavy duty mount base[5] |
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