Comparison ledger
Axcelis 200 ACU, Tegal 1511e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | 1511eTegal |
|---|---|---|
| OEM | Axcelis | Tegal |
| Category | Etch | Etch |
| Wafer size | — | three- to six-inch wafers |
| Process node | — | — |
| Introduced | — | 1984 |
| Production run | — | 1984– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Tegal 1511e |
| Specifications | ||
| Configuration | Parts Machine[1] | — |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| tool type | — | tri-electrode dual-frequency plasma etch system[5] |
| wafer size | — | three- to six-inch wafers[5] |
| first sold | — | 1984[5] |
| system characteristic | — | first vacuum-loadlocked dual-frequency tri-electrode etch system[5] |
| First vacuum-loadlocked dual-frequency tri-electrode etch system | — | Yes[5] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →