Comparison ledger
Axcelis 200 ACU, Semitool Scepter SCE A 311, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | Scepter SCE A 311Semitool |
|---|---|---|
| OEM | Axcelis | Semitool |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Semitool Scepter SCE A 311 |
| Specifications | ||
| Configuration | Parts Machine[1] | — |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | Scepter SCE A 311[5] |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | 8 inch[5] |
| Serial number | AU6A356AH[3] | G191108[7] |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | Wet Etcher[5] |
| Wafer configuration | 8 inch[2] | — |
| OEM | — | Semitool[5] |
| Description | — | Wet Etcher – Acid Spray[6] |
| Version | — | 200mm[6] |
| Vintage | — | 2001[5] |
| Date of manufacture | — | 2001[7] |
| Software revision | — | SAAB 3.1[7] |
| Location | — | Nijmegen[7] |
| Condition | — | As Is[7] |
| Wafer Size | — | 200 mm (8 inch)[5] |
| Process Type | — | Wet Etcher – Acid Spray[6] |
| Vintage (Year of Manufacture) | — | 2001[5] |
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