Comparison ledger
Axcelis 200 ACU, Lam Research Rainbow 4526 XL, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | Rainbow 4526 XLLam Research |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research Rainbow 4526 |
| Specifications | ||
| Configuration | Parts Machine[1] | Oxide Etch[5] |
| Manufacturer | Axcelis[1] | Lam Research[5] |
| Model | 200 ACU[1] | Rainbow 4526 XL[5] |
| Tool type | Asher[1] | Plasma etcher[5] |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Wafer type | — | Jeida flat[5] |
| Valve type | — | VAT 65[5] |
| Software | — | Envision 1.6.1-005[5] |
| RF | — | ENI-GHW50 / ENI-2MHz[5] |
| Robot | — | Harmonic Drive[5] |
| Loader | — | Hine Indexers 38A[5] |
| Loadlock | — | Entrance & Exit LL[5] |
| Turbo Pump | — | HGP Pump[5] |
| Controllers | — | HGP / VAT 65[5] |
| Category | — | Etch[6] |
| Process | — | Oxide etch[5] |
| Wafer sizes | — | 6 inch, 8 inch[5] |
| ESC | — | Present[5] |
| Endpoint | — | Monochromator Endpoint[5] |
| RF cart | — | Present[5] |
| Gas chamber | — | Present[5] |
| Ar | — | 485.0 sccm[5] |
| CF4 | — | 20.0 sccm[5] |
| CHF3 | — | 20.0 sccm[5] |
| C4F8 | — | 19.5 sccm[5] |
| CO | — | 200.0 sccm[5] |
| O2 LOW | — | 20.0 sccm[5] |
| O2 HIGH | — | 1000.0 sccm[5] |
| N2 | — | 100.0 sccm[5] |
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