Comparison ledger
Axcelis 200 ACU, Axcelis RapidStrip 210 ES, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | RapidStrip 210 ESAxcelis |
|---|---|---|
| OEM | Axcelis | Axcelis |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2007 Date of manufacture |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Axcelis RapidStrip 210 ES |
| Specifications | ||
| Configuration | Parts Machine[1] | System On-Line[5] |
| Manufacturer | Axcelis[1] | Matrix[5] |
| Model | 200 ACU[1] | 3kW switchmode powergen[5] |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | 8 inch[5] |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Part Number | — | 1080-6037[5] |
| Software Version | — | 1.8.7.0.06[5] |
| System Type | — | RapidStrip 210 ES[5] |
| Number of Cassettes | — | 2[5] |
| Load Type | — | Standard[5] |
| Install Type | — | Through-the-Wall[5] |
| Robot Type | — | Brooks[5] |
| Endpoint Detection Type | — | Monochromator[5] |
| Throttle Valve | — | MKS[5] |
| Foreline Valve | — | VAT[5] |
| OEM | — | Axcelis[5] |
| Category | — | Etch[6] |
| Cooling station | — | Present[5] |
| SECS/GEMS | — | Yes[5] |
| Ozone / microwave generator manufacturer | — | Matrix[5] |
| Ozone / microwave generator model | — | 3kW switchmode powergen[5] |
| Pump | — | IQDP 80[5] |
| Mechanical booster | — | QMB1200[5] |
| System status | — | System on-line[5] |
| CE mark | — | Certified[5] |
| Can produce wafers as-is | — | Yes[5] |
| All cables present | — | Yes[5] |
| System On-Line | — | Yes[5] |
| CE Mark Certified | — | Yes[5] |
| Cooling Station | — | Yes[5] |
| Date of Manufacture | — | 2007-12-31[7] |
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