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Comparison ledger

17099370 Outer strike plateversusGSD 200 E 2

Axcelis 17099370 Outer strike plate, Axcelis GSD 200 E 2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMAxcelisAxcelis
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis 17099370 Outer strike plateAxcelis GSD 200 E 2
Specifications
ConfigurationUsed with Axcelis GSD 200[1]—
Voltage—208 V[2]
Frequency—50 Hz[2]
Phase—3 Phase[2]
Type—High Current ion implanter[3]
Energy—180 KeV[3]
Wafer Size—8 inch (200 mm)[3]
Power Requirements—208 V, 125 A, 50 Hz, 3 Phase[2]
Vintage (listed unit 158479)—2000[4]
Vintage (listed unit 158478)—2004[2]
Maximum Energy—180 keV[3]
Current—125 A[2]
Energy Rating—180KeV[3]
Amperage—125 A[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]asseta.comasseta.com
  4. [4]Equipment inventory listing