Comparison ledger
ASML Twinscan XT 1400 F, Brooks 017-0024-01 Prealigner, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | |
|---|---|---|
| OEM | ASML | Brooks |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML Twinscan XT 1400 | Brooks 017-0024-01 Prealigner |
| Specifications | ||
| Configuration | 193nm (ArF)[1] | — |
| Make | ASML[1] | — |
| Model | Twinscan XT 1400 F[1] | — |
| Category | Lithography[2] | — |
| Wafer Sizes | 12 inch[1] | — |
| Wavelength | 193 nm[1] | — |
| Process Module | 200 mm[2] | — |
| Conversion Kit | 300 mm[2] | — |
| Resolution | 65 nm[3] | — |
| Numerical Aperture | 0.65 to 0.93[3] | — |
| Throughput | 133 wph (@125 exp per wafer)[3] | — |
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