Comparison ledger
ASML 5500 300 C, EV Group 101, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 5500 300 CASML | 101EV Group |
|---|---|---|
| OEM | ASML | EV Group |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML 5500 300 C | EV Group 101 |
| Cited variants |
| — |
| Specifications | ||
| Software Release | 6.2 and higher[2] | — |
| Actual Software Release | 6.2.3[2] | — |
| Model | 5500 300 C[2] | 101[3] |
| Wafer size | 8 inch[2] | — |
| Software release | 6.2.3[2] | — |
| Software release minimum | 6.2 and higher[2] | — |
| Productivity | 88 200 mm wafers per hour[1] | — |
| Illuminator | AERIAL Illuminator[1] | — |
| Type | DUV Stepper[1] | — |
| Throughput | 88 wafers per hour (200 mm)[1] | — |
| Illumination | AERIAL illuminator[1] | — |
| Resolution capability | Extendibility beyond 0.25 μm[1] | — |
| Throughput (200 mm wafers) | 88 wafers per hour[1] | — |
| Illuminator type | AERIAL[1] | — |
| Machine type | Stepper (step-and-repeat) lithography system[2] | — |
| Imaging wavelength band | Deep UV (DUV)[1] | — |
| Illumination system | AERIAL Illuminator[1] | — |
| Resolution extendibility | Beyond 0.25 µm[1] | — |
| OEM | — | EV Group[3] |
| Equipment name | — | EVG 101 Spray Coater[3] |
| NEMO ID | — | evgspraycoat[3] |
| Training required | — | EVG 101 Training[3] |
| Training duration | — | 1.50 hours[3] |
| Processing technique | — | Resist Spray Coat (manual)[3] |
| Cleanliness | — | "All"[3] |
| Location | — | SNF Paul G Allen L107 Cleanroom[3] |
| Wafer diameter (substrate size) | — | up to 300 mm[4] |
| Available modules | — | Spin coat / OmniSpray® / develop[4] |
| Wafer handling options | — | Bowed / warped / thin wafer handling, edge handling[4] |
| Dispense options | — | Various resist dispense pumps covering viscosities up to 52000 cP; constant pressure dispense systems; EBR / BSR / pre-wet / bowl wash / liquid priming[4] |
| Processing technique (at SNF) | — | Resist Spray Coat (manual)[5] |
| Cleanliness group (at SNF) | — | "All"[3] |
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