Comparison ledger
Applied Materials UVision 600 SP, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | UVision 600 SPApplied Materials | |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials UVision | KLA .204 PSL Wafer |
| Specifications | ||
| Loading Configuration | FOUP, 2 positions[1] | — |
| Configuration | Loadport - ASYST Isoport[1] | NIST Traceable[2] |
| Carrier Reader ID | OHT[1] | — |
| Operating software | Windows XP[1] | — |
| Software Version | 7.5_1[1] | — |
| Loadport | ASYST Isoport[1] | — |
| Illumination | Deep UV[1] | — |
| Vintage | 2008[1] | — |
| Wafer Size | — | 8 inch[2] |
| Traceability | — | NIST[3] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[2] |
| NIST Traceable | — | Yes[2] |
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