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Comparison ledger

SEMVision G 2 CD-SEMversus.496 PSL Wafer

Applied Materials SEMVision G 2 CD-SEM, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SEMVision G 2 CD-SEMApplied Materials
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials SEMVisionKLA .496 PSL Wafer
Specifications
ConfigurationWith EDX (Energy Dispersive X-ray Spectroscopy)[1]NIST Traceable[3]
Largest Load8 A[1]—
Full Load Current10 A[1]—
ManufacturerApplied Materials[1]—
ModelSEMVision G 2[1]—
Tool typeCD-SEM (Critical Dimension Scanning Electron Microscope)[1]—
CategoryMetrology & Inspection[2]Metrology & Inspection[4]
Wafer size12 inch[1]8 inch[3]
EDXIncluded[1]—
HDD and softwareIncluded[1]—
Traceability—NIST Traceable[3]
Compatible systems—Capable on Surfscan 6xy0 and SP1[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com