Comparison ledger
Applied Materials Reflexion 3600, Lapmaster 12 Benchtop Lapping Polishing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Reflexion 3600Applied Materials | 12 Benchtop Lapping PolishingLapmaster |
|---|---|---|
| OEM | Applied Materials | Lapmaster |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials Reflexion | Lapmaster 12 Benchtop Lapping Polishing |
| Specifications | ||
| CE Segregation (NonCu/Open/Cu) | Cu[1] | — |
| Configuration | SW version:[1] | Ring lapper[5] |
| Reflexion Software | PB59M3i2[1] | — |
| MESA software | CB22M3i2[1] | — |
| ISRM software | IB11g5b[1] | — |
| FI robot type / controller | Kawasaki[1] | — |
| Load port | TDK TAS 300 (2)[1] | — |
| FI controller | AMAT VMICPCI-7326[1] | — |
| Wet robot type | Yaskawa WTM511-2-FWS02-V1-CU/0190-08246 (1)[1] | — |
| Polisher MEI B/D | AMAT 0100-00722 (3)[1] | — |
| Polisher AIO B/D | AMAT 0100-00396 (2)[1] | — |
| Polisher DIO B/D | AMAT 0100-01995 (7)[1] | — |
| Platen Driver | Yaskawa SGDH-75 AE (3)[1] | — |
| Cross Driver | Yaskawa SGDH-08 AE-S (1)[1] | — |
| Pad Conditioner/HCLU Driver | Yaskawa SGDH-01 AE (7)[1] | — |
| Head SWEEP Driver | Yaskawa SGDH-04 AE (4)[1] | — |
| Head Rotation Driver | SE 2 VOSTARCD CR 06250 (4)[1] | — |
| Meg Generator | Kaijo 600 (1)[1] | — |
| Mega Heater | Orion ETD 232-SA-A-UL (1)[1] | — |
| Slurry arm Type | AMAT 0040-78378 (3)[1] | — |
| Make | Applied Materials[1] | Lapmaster[2] |
| Model | Reflexion 3600[1] | 12[2] |
| Category | CMP (Chemical Mechanical Polisher)[1] | CMP[3] |
| CE Segregation | Cu[1] | — |
| PC Arm assembly | AMAT 0010-25311 (3)[1] | — |
| iScan EndPoint module | AMAT 0010-37905[1] | — |
| Vintage | 2011[1] | — |
| Type/Application | — | Single sided[4] |
| Plate diameter | — | 12 in[4] |
| No. of conditioning rings | — | 3[5] |
| Base | — | Rigid, lightweight, cast aluminum base[5] |
| Standard RPM | — | 60 RPM[5] |
| RPM range with variable speed drive | — | 0-60[5] |
| Drive motor - lapper | — | 0.5 HP[5] |
| Drive motor - polisher | — | 0.75 HP[5] |
| Length | — | 25 in[5] |
| Width | — | 18 in[5] |
| Height | — | 24 in[5] |
| Estimated shipping weight | — | 240 lbs[5] |
| Approximate weight | — | 135 lbs / 61 kg[6] |
| Approximate dimensions | — | 24.5 in × 17.5 in × 23.8 in (622 mm × 445 mm × 607 mm)[6] |
| Electrical system | — | Various voltages; 50/60 Hz; 1 phase and 3 phase to customer specification[6] |
| Motor | — | 1/3 hp / 0.25 kW motor with gear reducer[6] |
| Abrasive feed system | — | Designed for water or oil based lapping slurries[6] |
| Automatic cycle timer | — | Automatic digital cycle timer[6] |
| Ring configuration | — | Ring lapper[5] |
| Ring ID | — | 4.25 inches[5] |