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Comparison ledger

Quantum 120 Leapversus0216 7696, E 11368072 ESC

Applied Materials Quantum 120 Leap, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Quantum 120 LeapApplied Materials
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials Quantum 120 LeapVarian 0216 7696, E 11368072 ESC
Specifications
Voltage208 V[1]—
Phase3 Phase[1]—
Circuit breaker250 A[1]—
Single Largest Load90 A (Beamline Iso TX)[1]—
Interrupt Capacity65000 A[1]—
Configuration—Platen ADV-S Type[2]
Type—ESC Platen ADV-S Type[2]
Category—Ion Implantation[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com