Waferpedia

Comparison ledger

Producer GT 3 RTPversus1000 Hot Plate

Applied Materials Producer GT 3 RTP, CEE 1000 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Producer GT 3 RTPApplied Materials
OEMApplied MaterialsCEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials ProducerCEE 1000 Hot Plate
Specifications
ConfigurationPyra Anneal[1]4"[2]
OEMApplied Materials[1]—
ModelProducer GT 3[1]—
Tool typeRapid Thermal Process (RTP)[1]—
Wafer size12 inch[1]—
Type—Hot Plate[2]
Wafer Size—4 inch[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing