Waferpedia

Comparison ledger

P 16 072 Ancolyzerversus1000 Family

Applied Materials P 16 072 Ancolyzer, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
P 16 072 AncolyzerApplied Materials
1000 FamilyUltratech
OEMApplied MaterialsUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials P 16 072 AncolyzerUltratech 1000 Family
Specifications
ConfigurationDosage Additive (3)[1]—
Dosage Additive Units3[1]—
Slipstreams with Pump2[1]—
Dosing VMS (incl. Bleed & Feed)2[1]—
Bulk Fill TanksPresent[1]—
Additional Doses of H2O2 and H2SO4Present[1]—
Scanner (incl. Software)Present, 2016 vintage[1]—
Tool type—Photolithography step-and-repeat 1X stepper[2]
Optical design—Wynne Dyson[2]
Magnification—1X[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]en.wikipedia.orgen.wikipedia.org