Comparison ledger
Applied Materials eMax CT Plus Dielectric, Oxford Instruments 100 ICP Fluorine, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | eMax CT Plus DielectricApplied Materials | 100 ICP FluorineOxford Instruments |
|---|---|---|
| OEM | Applied Materials | Oxford Instruments |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials eMax | Oxford Instruments 100 ICP Fluorine |
| Specifications | ||
| Configuration | Alcatel ATH 1600 M Turbo Pump[1] | — |
| Bias | 13.5 MHz (Bias) & 2 MHz (LF Bias)[1] | — |
| LF Bias | Daihen RMN-50N1[1] | — |
| Source | Daihen AMN-30 H 60 MHz[1] | — |
| Gate Valve | Nor-Cal / NC-95-PP[1] | — |
| FIB | eFib, wFib[1] | — |
| Turbo Pump | Alcatel ATH 1600 M[1] | — |
| RF Match Box | Included[1] | — |
| RF Generator | Included[1] | — |
| Chamber Equip Cart | Included[1] | — |
| Etch Gases | — | SF6, CF4, O2, Ar, N2, CHF3, C4F8[2] |
| Cryo DRIE etch rate | — | up to 5 µm/min[2] |
| Wafer size | — | 4 inch, 6 inch, 8 inch (with clamp change)[2] |
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