Comparison ledger
Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Vitronics Soltec XPM 3 1030, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0242-36515 RTP XE Chamber Temperature Match KitApplied Materials | Soltec XPM 3 1030Vitronics |
|---|---|---|
| OEM | Applied Materials | Vitronics |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Vitronics Soltec XPM |
| Specifications | ||
| Voltage | — | 400 V[1] |
| Phase | — | 3 Phase[1] |
| Frequency | — | 50 Hz[1] |
| Configuration | — | Conveyor Options:[1] |
| Rail | — | 38 mm / 1.5"[1] |
| Belt | — | 60 mm / 2.38"[1] |
| Power supply | — | 400 V, 3 phase, 50 Hz[1] |
| Conveyor rail width | — | 38 mm / 1.5 in[1] |
| Conveyor belt width | — | 60 mm / 2.38 in[1] |
| XCS edge rail conveyor | — | 18 in [457 mm][1] |
| Atmosphere options | — | N2 atmosphere operation with True N2-AIR switching and PC-controlled multi-port O2 sampling system; also available in AIR atmosphere operation[2] |
| Conveyor control | — | Computer-controlled edge rail/chain lubrication and computer-controlled rail width adjust[1] |
| Cooling system | — | Enhanced Cooling Package 2 (EC2) with 3 zones cooling using fin heat exchangers (integrated on-board re-circulating system) or tube heat exchangers (integrated on-board recirculating chiller)[1] |
| SMEMA interface | — | SMEMA equipment interface and product tracking, single or dual lane (per IPC-SMEMA-9851)[1] |
| Compliance | — | CE European Safety Compliance[1] |
| Host communications | — | CAMX (Computer Aided Manufacturing using XML) host communication software per IPC-2501, providing centralized message broker, open standard information routing, and HTTP interface to pass XML messages[2] |
| Additional options | — | Primary and secondary cell blower speed control, individual cell sensing, integrated exhaust stack filter, high temperature exhaust hose kit, UPS battery back-up system[1] |
| CE Compliance | — | European Safety Compliance[1] |
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