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0242-36515 RTP XE Chamber Temperature Match KitversusKokusai DJ 1206 V DF LPCVD

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Hitachi Kokusai DJ 1206 V DF LPCVD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsHitachi
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Hitachi Kokusai DJ 1206 V DF LPCVD
Specifications
Manufacturer—Hitachi Kokusai[1]
Model—DJ 1206 V DF[1]
Type—Low Pressure Chemical Vapor Deposition (LPCVD) Furnace[1]
Wafer Size—12 inch[1]
Year—2007[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing