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0242-36515 RTP XE Chamber Temperature Match KitversusKokusai DD 853 V Vertical Diffusion

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Hitachi Kokusai DD 853 V Vertical Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsHitachi
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Hitachi Kokusai
Specifications
Configuration—For oxidation, diffusion, and annealing[1]
Water Exposure—water marks inside and outside the unit[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing