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Comparison ledger

0041-39086 ESC PartversusGasonics PEP 4800 DL

Applied Materials 0041-39086 ESC Part, Lam Research Gasonics PEP 4800 DL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lam Research Gasonics PEP 4800
Specifications
Configuration—SMIF (2)[1]
Manufacturer / OEM—Lam / Novellus / Gasonics[1]
Model—PEP 4800 DL[1]
Category—Etch[2]
Wafer size—8 inch[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com