Waferpedia

Comparison ledger

0021 32427 PartversusATM 305 307 Atmospheric Wafer Handling Robot

Applied Materials 0021 32427 Part, Brooks ATM 305 307 Atmospheric Wafer Handling Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0021 32427 PartApplied Materials
OEMApplied MaterialsBrooks
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0021 32427 PartBrooks ATM
Specifications
ConfigurationCooling Plare, Countermatch,300mm Produc[1]Single Arm[2]
Wafer sizes (primary)—200/300 mm[3]
Wafer sizes (alternative)—6 and 12 inch[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]fabsurplus.comfabsurplus.com