Waferpedia

Comparison ledger

0021 20868 PartversusATR 8 Robot

Applied Materials 0021 20868 Part, Brooks ATR 8 Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0021 20868 PartApplied Materials
OEMApplied MaterialsBrooks
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0021 20868 PartBrooks ATR 8 Robot
Specifications
ConfigurationBar, Bus, Gnd, Turbo Cb Encl, Gen Rack,[1]Lam Tool[2]
Manufacturer—Brooks[2]
Model—ATR 8[2]
Wafer Sizes—12 inch[2]
Description—12" Lam Tool[2]

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing