Waferpedia

Comparison ledger

0020 23839 PartversusEagle XP 5 PE-ALD

Applied Materials 0020 23839 Part, ASM Eagle XP 5 PE-ALD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 23839 PartApplied Materials
OEMApplied MaterialsASM
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 23839 PartASM Eagle
Specifications
ConfigurationPlate, Sensor Clamp, Hdpcvd Ultima +[1]Software Version Eagle I ASMJ software (Windows embedded XP / OS)[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing