Comparison ledger
Applied Materials 0020 18698 Part, Tokyo Electron Alpha 6 S, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0020 18698 PartApplied Materials | Alpha 6 STokyo Electron |
|---|---|---|
| OEM | Applied Materials | Tokyo Electron |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2000 Vintage year (base model) · 2011 Vintage year (CVD variant) |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0020 18698 Part | Tokyo Electron Alpha |
| Cited variants | — | |
| Specifications | ||
| Configuration | Dial Cover, Side Local Match, Hdpcvd, Ul[2] | Batch processing[3] |
| Processing type | — | Batch[3] |
| Chamber type | — | Gas in vacuum state chamber[3] |
| Process type | — | Chemical Vapor Deposition (CVD)[1] |
| Deposited film | — | Low-pressure silicon nitride (LP SIN)[1] |
| Wafer size | — | 8 inch[1] |
Plan your fab
Building a Deposition process? Get a complete equipment list.
Open the fab equipment planner →