Waferpedia

Comparison ledger

0020 18698 PartversusConcept Two Triple Speed

Applied Materials 0020 18698 Part, Lam Research Concept Two Triple Speed, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18698 PartApplied Materials
OEMApplied MaterialsLam Research
CategoryDepositionDeposition
Wafer size—Entegris FA 200-85 MT 7902 Wafer Cassette
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18698 PartLam Research Concept Two Triple Speed
Specifications
ConfigurationDial Cover, Side Local Match, Hdpcvd, Ul[1]DLCM[2]
Wafer Substrate—Silicon[2]
Software—Speed Next 5.502 B22[2]
Cable length—75 ft[2]
Wafer size—Entegris FA 200-85 MT 7902 Wafer Cassette[2]
Front End Option—SMIF Ready[2]
User Interface Options—Cleanroom (Right Side)[2]
Paddle & Arc Kits—STD[2]
Cool Station Options—MPS (Multi PEC Station)[2]
Particle Check Options—Particle Sensor Manifold[2]
Manometers—Heated[2]
Pressure Control—MKS[2]
Facilities Kit—Bottom[2]
Light Towers—3 Lights - RYG[2]
Light Towering Mounting—Staff Mount[2]
TM Cover Options—STD Cover[2]
MPD—Triple[2]
Wafer Size—8 inch[2]
Cable Length—75 ft DLCM[2]
Wafer Cassette—Entegris FA 200-85 MT 7902[2]
Active Wafer Centering—Yes[2]
Light Tower Mounting—Staff Mount[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing