Waferpedia

Comparison ledger

0010 47763versusConcept Two Speed S (A)

Applied Materials 0010 47763, Lam Research Concept Two Speed S (A), side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010 47763Applied Materials
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2010 Vintage
Control system——
Generation——
FamilyApplied Materials 0010 47763Lam Research Concept Two
Specifications
Configuration2nd Source New[1]Chamber Only[4]
TypeMonopolar Dual Heated[2]Chamber Only[4]
DescriptionASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[3]—
Possible MaterialsAl2O3 (aluminum oxide) or AlN (aluminum nitride)[2]—
Model0010-47763[1]—
OEMApplied Materials[1]—
Material (possible)Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2]—
ApplicationFixing wafers in etching process (PVD, CVD, ETCH)[2]—
Quantity available (source)1[2]—
Voltage—208 VAC[4]
Phase—3 Phase[4]
Full Load—21 A[4]
Main Breaker Rating—25 A[4]
Largest Load—8 A[4]
Interrupt Current—10 KA[4]
Vintage—2010[4]
Frequency—50/60 Hz[4]
Full Load Current—21 A[4]

Plan your fab

Building a Etch process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]saulcontrol.comsaulcontrol.com
  3. [3]getspares.comgetspares.com
  4. [4]inventory listing