Waferpedia

Comparison ledger

0010 47763versusEnabler

Applied Materials 0010 47763, Applied Materials Enabler, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010 47763Applied Materials
EnablerApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2010 Vintage
Control system——
Generation——
FamilyApplied Materials 0010 47763Applied Materials Enabler
Cited variants—
  • Centura AP Enabler E5[1]
  • Centura AP Enabler FEOL-E5[2]
Specifications
Configuration2nd Source New[3]—
TypeMonopolar Dual Heated[4]—
DescriptionASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[5]Dielectric etcher[1]
Possible MaterialsAl2O3 (aluminum oxide) or AlN (aluminum nitride)[4]—
Model0010-47763[3]Enabler[6]
OEMApplied Materials[3]—
Material (possible)Al2O3 (aluminum oxide) or AlN (aluminum nitride)[4]—
ApplicationFixing wafers in etching process (PVD, CVD, ETCH)[4]—
Quantity available (source)1[4]—
Manufacturer—Applied Materials[6]
Category—Etcher[6]
Wafer size—12 inch[6]
Process chambers—4[1]
Version—300 mm[1]
Configured wafer size—300 mm[7]
Process—OX[7]
Software revision—B2.8_79[7]
FI software—FB4.70_12[7]
GEM software—7.20_17[7]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]inventory listing
  4. [4]saulcontrol.comsaulcontrol.com
  5. [5]getspares.comgetspares.com
  6. [6]Equipment inventory listing
  7. [7]tarasemi.comtarasemi.com